TESC7080
Teslaman TESC7080 series electrostatic chuck power supply is suitable for electrostatic chuck semiconductor processing applications. It can provide the required accurate voltage within 10ms and switch polarity within 1s. These customized designs provide protection during the semiconducting process. It can provide ground reference reversible output polarity, as well as floating ground bipolar output with related floating interface. Integrated troubleshooting circuits monitor power functions and transfer state data to the user interface. It adopts a compact and lightweight package and can be OEM.
Typical Application：E-Cuck, Electrostatic chuck, electrostatic suction cup, electrostatic adsorption system
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Features
- Ground Reference Reversible Output
- Central point monitoring
- Analog quantity control
- 485 control
- Ethernet control
CONTACT US
Telephone：+86411-84754722
Mobile：+8615642371743
Wechat：15642371743
Email：chengxingqi@teslamanhv.com
URL：www.teslamanhv.com
Product Specifications
Input Voltage
+24VDC±5%,5A. Switch controlled on front panel and fuse protected.
Output Polarity
Floating ground, bipolar output, polarity switchable.
Maximum Output Voltage
0 to ±5kV.
Maximum Output Current
2mA.
Maximum Output Power
20W.
Voltage Regulation
Load
≤0.001% (no load to rated load).
Conversion Rate
Typical 1s.
Maximum cycle frequency
0.5Hz.
Overshoot
<10% of the set value
Ripples
3Vpp.
Line
<0.1% for 10% input voltage change under any load conditions
Load
<1.3% for zero to full load
Voltage Display
Resolution = 100V Accuracy = ±1% of actual output (±10 volt offset)
Current Display
Resolution = 100μA. Accuracy = ±2% of the actual output ±100μA offset.
Typical Load Capacitance
<20nF (for other load capacitors, please contact Teslaman).
Protection
Arc and short circuit protection. Equipped with input and output current limits. The output current limit can be set in the range of 0.1mA to 2mA. Continuous arc protection needs to be customized.
Communication
Through DB9 analog control, RS-485 serial interface, USB or Ethernet can also be selected for control.
Note
When Ethernet is connected to LAN port/485, serial communication will be disabled
Front panel control
With front panel buttons for local control.
Switch
Manually change the output polarity.
Output On/Off
The soft switch mode controls the high-voltage output.
Rotation Control/Input
Used for navigation and input value changes.
Stability
After preheating for 1 hour, <0.3%/hour, <03%/8 hours under
constant operating conditions.
Temperature Coefficient
<0.3%.
Ambient Temperature
Operational
0C̊ to 45̊C;
Storage
-20℃ to 70℃;
Humidity
0 to 85% RH, non-condensation.
Cooling
convection cooled.