Technical Articles

Remote Monitoring Solution for Electron Microscope High-Voltage Power Supplies

As a core tool for nanoscale observation, the stability of a...

Research on Adaptive Regulation of High-Voltage Power Supply in Etching Equipment

In semiconductor manufacturing, the precision of etching proces...

Research on Key Technologies for High-Voltage Pulse Timing Optimization in Excimer Lasers

Excimer lasers, as core light sources in the ultraviolet band...

Anti-Interference Design of High-Voltage Power Supply for Lithography Machines

As the core equipment in semiconductor manufacturing, the stab...

Modular Research on High-Voltage Power Supplies for Excimer Lasers

Excimer lasers, serving as core deep-ultraviolet light sources,...

Transient Protection Design for High-Voltage Power Supplies in Ion Implantation

Ion implanters are critical equipment in semiconductor manufact...