Technical Articles
Capacitor Charging Power Supply Matrix Parallel Module
Capacitor charging power supplies represent a critical class o...
High-Voltage Control for Passivation Steps in Bosch Deep Silicon Etching Processes
The Bosch process, a time-multiplexed deep reactive ion etchin...
High-Current Power Systems for Powder Bed Preheating Uniformity in Electron Beam Melting
Electron Beam Melting is an additive manufacturing technology ...
High-Voltage Power Supply for Ion Implantation Wafer Thermal Budget Control
Ion implantation is a fundamental doping process in semiconduc...
Optimized High-Voltage Power Supply for Electron Beam Direct Write Resist Sensitivity
Electron beam direct write (EBDW) lithography remains a critic...
High-Voltage Power Supply for Electrostatic Chuck Edge Effect Compensation
In advanced semiconductor fabrication processes, particularly in...
Remote Quantum Voltage Standard Comparison for PPM-Level Calibration of High-Voltage Measurement Systems
The metrological assurance of high-voltage measurements is a c...
Precision Modulation of Pulse Period for High-Voltage Sputtering and Plasma-Enhanced Coating Power Supplies
In the realm of physical vapor deposition (PVD), sputtering, ...
Enhancement of Electrostatic Powder Coating Charging Efficiency via High-Voltage Optimization
The electrostatic powder coating process relies fundamentally o...