TMO7036
The TMO7036 series high-voltage power supply from Teslaman is specially designed for the application of electrostatic chucks, of outputting precise voltages within 10ms and switching polarity within 1s, thus providing protection for semiconductor processes. It features reversible ground-referenced polarity and can also output floating-ground bipolar voltages with corresponding floating-ground interfaces. It also has comprehensive fault diagnosis and status monitoring functions, which can transmit data to the interface. Its packaging design is compact and lightweight, suitable for OEM.
Typical Application：E-Chuck.
Reference Back to listFeatures
- +24V DC Input
- Switchable polarity 20ms switching time
- 6 channels output
- Polarity hot switchable
- Analog/RS485 digital interface
- 100nf load detection
CONTACT US
Telephone：+86411-84754722
Mobile：+8615642371743
Wechat：15642371743
Email：chengxingqi@teslamanhv.com
URL：www.teslamanhv.com
Product Specifications
Input
+24VDC±5%, 5A
Input port
125 pins
Output channels
Independent 6 channels
Output voltage range
-5kV ~ +5kV.
Output current
Setting range 0-35mA (load<1μF)
Voltage accuracy
±1% of rated value
Ripple
Typical <100mV p-p (load<10nf, 0-1MHz)
Pass origin
Yes
Over-shoot
Typical< 2V (load<10nf, from -5kV to +5kV)
Output delay
<3ms
Switching period
Typical 20ms (load<10nf, from -5kV to +5kV)
Frequency
Typical 50Hz (load<10nf, from -5kV to +5kV)
Output impendence
>20kΩ (each channel)
Voltage display
Resolution=1V, Accuracy better than ±50V
Current display
Resolution=10μA, Accuracy=actual output ±100μA, bias ±2%
Stability
2V/s
Line regulation
<0.1% when input change within 10%
Load regulation
<1.3% from 0 to full load
Protection
Input over/under voltage, over current; output over-voltage, over-current and over-temperature protection
Function
Voltage and current setting, d-chuck, etc.
Interface
DB25 analog, or RS-485 series port or other customizable
Control signal
0 corresponds to -5kV, 5 corresponds to 0kV, 10V corresponds to +5kV(customizable)
Typical load capacitance
<10nf (Please contact Teslaman for other load information)
Position detection
<100nF (need external detection module)
Temperature coefficient
<300ppm/℃ for current and voltage. At full load<0.1%p-p
Environmental
Operational
0˚C to 45˚C
Storage
-20˚C to 70˚C
Humidity
0 to 85%RH, non condensing
Cooling
Convection
Dimensions
W 355mm, H44.25mm, D 243mm