TMO7032
TMO7032 Series static chuck dedicated high voltage power supply provides precise output of ±5kV/35mA (±1%, ripple <100mVp-p), and supports load capacitance detection for under 100nF load. It has the of 20ms fast zero-crossing switching, integrates multiple protection functions, and supports analog/RS485 control and LCD display. It has been applied in semiconductor implantation and etching equipment, with stable and reliable performance. Its compact and lightweight packaging design can be OEM.
Typical Application：E-Chuck.
Reference Back to listFeatures
- +24V DC Input
- Independent two channels output ±5kV each channel
- Maximum 35mA for each channel
- Ripple <20ppm
- 20ms polarity switching time
- Polarity hot switch
- Analog and RS485 interface
- 100nF capacitance position detection
CONTACT US
Telephone：+86411-84754722
Mobile：+8615642371743
Wechat：15642371743
Email：chengxingqi@teslamanhv.com
URL：www.teslamanhv.com
Product Specifications
Input
+24VDC±5%. 5A
Input port
125 pins
Output
Independent 2 channels
Voltage range
-5kV to +5kV adjustable each channel
Output current
Setting range 0 ~35mA (load < 1μF)
Voltage accuracy
±1% of rated value
Ripple
Typical < 100mVp-p, (10nf, 0~1 MHz)
Pass 0
Yes
Over-shoot
Typical < 2V (Load capacitance 10nF, from -5kV, to +5kV)
Output delay
Less than 3ms
Switching period
Typical 20ms ( Load capacitance 10nF, from -5kV, to +5kV)
Frequency
Typical 50Hz (Load capacitance 10nF, from -5kV, to +5kV)
Output Impedance
>20kΩ（single channel）
Voltage display
Resolution= 1V Accuracy = ±50V
Current display
Resolution= 10μA Accuracy = Actual value ± 100μA, bias ±2%
Stability
2V/s
Line regulation
<0.1% when input change within 10%
Load regulation
<1.3% from 0 to full load
Protection
Arc and short-circuit protection. Input and output current limiting. Output current setting range between 0.1mA to 2mA
Local control
Voltage adjustment, current setting, d-chuck button, LCD display
Communication
DB25 analog, RS-485
Interface signal
0 to 10V corresponding to -5kV to +5kV
Typical Load capacitance
<10nF
Load detection
<100nF (need external detection module)
Temperature coefficient
<300ppm/℃ for current and voltage. At full load<0.1%p-p
Dimensions
241 mm x 88 mm x 411mm（W x H x D）
Environmental
Operational
0˚C to 45˚C；
Storage
-20˚C to 70˚C
Humidity
0 to 85%RH, non condensing
Cooling
Convection