TESC7081
TESC7081 series static chuck high voltage power supply is a high-performance power product designed specifically for driving static chuck devices. a dual independent output design, each output can provide ±5kV, and the polarity switching time is less than 20ms. This product not only comes with detailed users but also shows excellent energy efficiency in actual applications. According to customer feedback, the production efficiency has been significantly improved after the system was equipped with this power supply, even reaching more three times of other similar systems. In addition, the TESC7081 series has successfully addressed industry-common problems such as wafer adhesion and cracking, thereby greatly the control capability of particle pollution. With its excellent versatility and stable performance, the TESC7081 series can be widely used in a variety of special process scenarios to the high standards of different customers.
Typical Application：E-Chuck,Electrostatic driving material handling, semiconductor wafer processing, non-mechanical conveyance of flat panels or other materials sensitive to mechanical shearing.
Reference Back to listFeatures
- Coulomb type
- Customizable clamping/releasing sequence and waveform，configuration files can be uploaded and stored via the software interface;
- Front-panel control can be locked to prevent accidental operation;
- Support for parameter adjustment such as overcurrent，wafer status，clamping threshold，
- voltage control，etc.; Support for amplitude/offset online adjustment and diversified output control;
- Output can be via RS485 communication or front-panel operation
CONTACT US
Telephone：+86411-84754722
Mobile：+8615642371743
Wechat：15642371743
Email：chengxingqi@teslamanhv.com
URL：www.teslamanhv.com
Product Specifications
Input
+24VDC±5%,6A.
Channels
Independent 2 channels output.
Output Range
-5kV~+5kV continuously adjustable for each channel.
Output Current
6.5mA.
Voltage Accuracy
±1% of rated value.
Ripple
0.1%p-p.
Hot switchable
Yes.
Overshoot
Typical<2V (Form-5kV to +5kV when load is 10nf).
Output Delay
<3ms.
Switching Time
Typical 20ms（Form-5kV to +5kV when load is 10nf）.
Frequency
Typical 50Hz（Form-5kV to +5kV when load is 10nf）.
Output Impedance
＞20kΩ/channel.
Voltage Display
Resolution= 1V. Accuracy <±50V.
Current Display
Resolution=10μA. Accuracy=Actual value ±100μA bias ±2%.
Stability
<0.01% every 8 hours after half hour warm-up.
Line Regulation
<0.1% for 10% input voltage change under any load condition.
Load Regulation
<1.3% form no-load to full load.
Protection
Input under/over voltage,over current,Output over voltage,over current, over temperature.
Front Panel Control
LCD Screen,Voltage setting、Current setting、d-chuck.
Communication
DB25 analog,RS-485 series port, could customize for other option.
Control Signal Parameters
0 for -5kV,5V for 0kV,10V for +5kV（could customize for other option）.
Typical load capacitance
<10nF (Please contact us for other value).
Load detection range
<100nF.
Temperature Coefficient
Voltage and current <300ppm/℃. Full load<0.1%p-p,Max output.
Environmental
Operational
0˚C to 45˚C；
Storage
-20˚C to 70˚C.
Humidity
0 to 85%RH,non-condensing.
Cooling
Convection.
Dimensions
W482.6mm ,H44mm ,D481mm.