TESC7080-C0021
Teslaman TESC7080 series is a high- voltage power supply specifically designed for electrostatic chucks. It delivers precise ±2 kV output (accuracy: ±1%, ripple: <100 mVp- p), with a leakage current monitoring protection value adjustable from 0 to 20 mA. It supports in-situ capacitance detection up to 30 nF. Featuring fast 20 ms zero- crossing switching capability, it integrates multiple protection functions and supports analog control, RS232, USB, Ethernet, and LCD display. It has been applied in semiconductor ion implantation and etching equipment, demonstrating stable and reliable performance. Its compact and lightweight package design makes it suitable for OEM integration.
Typical Application：E-Chuck (Electrostatic Chuck), also referred to as electrostatic chuck or electrostatic adsorption system.
Reference Back to listFeatures
- +24V DC input
- Bipolar output with 20 ms polarity switching
- Smooth zero - crossing
- Analog control / RS232 control / USB control /Ethernet control
- In - situ capacitance detection range: 2 pF to 30 nF
- In - situ capacitance detection rate: 10 times per second (within 1 s)
CONTACT US
Mobile：+8615642371743
Wechat：15642371743
Email：yuhang@teslamanhv.com
URL：www.teslamanhv.com
Product Specifications
Input
+24VDC±5%,5A.
Number of channels
2 channels, each independently adjustable.
Adjustment range
Each channel continuously adjustable from –2 kV to +2 kV.
Voltage accuracy
±1% of rated value.
Ripple
Typically <100 mVp- p (with 10 nF load, 0–1 MHz, flat-top ripple).
Zero- crossing capability
Supported.
Overshoot (over/undershoot)
Typically <2 V (with 10 nF load, from –2 kV to +2 kV).
Input-to- output delay
Better than 3 ms.
Slew rate (rise/fall)
Typically 20 ms (with 10 nF load, from –2 kV to +2 kV).
Cycle frequency
Typically 50 Hz (with 10 nF load, from –2 kV to +2 kV).
Output impedance
>20 kΩ (per channel).
Voltage display
Resolution = 1 V. Accuracy better than ±50 V.
Current display
Resolution = 10 μA. Accuracy = ±2% of actual output ±100 μA offset.
Stability
Less than 0.01% per 8 hours after 0.5- hour warm- up.
Line regulation
<0.1% for 10% input voltage change under any load condition.
Load regulation
<1.3% from zero to full load.
Protection
Input over-/under- voltage, overcurrent; output overvoltage, overcurrent, over-temperature.
Front panel control
LCD display; voltage adjustment, current setting, clamp, d- clamp, etc.
Communication
Analog control via DB15; RS- 232 serial interface optional (other interfaces available upon request).
Control signal
0 V corresponds to –2 kV, 5 V corresponds to 0 kV, 10 V corresponds to +2 kV (other scaling available upon request).
Typical load capacitance
<30 nF (for other load capacitance values, please contact Teslaman).
In-situ capacitance detection range
Up to 30 nF.
Temperature coefficient
Better than 300 ppm/°C for voltage and current. <0.1% p- p at full load, maximum output.
Ambient temperature
Operating
0 °C to 45 °C
Storage
–20 °C to 70 °C.
Humidity
0 to 85% RH, non- condensing.
Cooling
Natural convection.
Dimensions
482.6 mm (W) × 44 mm (H) × 457 mm (D).
Weight
3 kg.