Energy Efficiency Classification Standard for High-Voltage Power Supply of Exposure Machine

With the advancement of the "dual carbon" goal in the semiconductor industry, the energy efficiency of the high-voltage power supply for exposure machines (annual power consumption exceeding 10,000 kWh/unit) has become a key indicator. However, there is no unified classification standard in the industry, leading to chaotic energy efficiency labeling by manufacturers (e.g., some manufacturers only label the energy efficiency at rated load and avoid the problem of low efficiency at light load). Users have no basis for selection, resulting in energy waste. According to statistics, inefficient power supplies (energy efficiency <85%) consume 1200 kWh more electricity per year than efficient power supplies (energy efficiency >92%), and the total annual wasted electricity in the industry exceeds 100 million kWh.
Formulating the energy efficiency classification standard needs to clarify three cores: "indicator definition, test method, and grade division": at the indicator definition level, the "Comprehensive Energy Efficiency Coefficient (CEC)" is used as the classification basis, covering three dimensions: energy efficiency at rated load (100% load rate), energy efficiency at light load (30% load rate), and standby power consumption (0% load rate), with weights of 50%, 30%, and 20% respectively, avoiding the problem of "high efficiency at rated load and low efficiency at light load" caused by a single indicator; at the test method level, referring to the IEC 61204-3 standard, under the conditions of ambient temperature 25℃±5℃ and input voltage 220V±10%, a power analyzer (accuracy class 0.1) is used to measure the input power and output power at different load rates to calculate the energy efficiency value. The standby power consumption test needs to last for 1 hour, and the average value is taken; at the grade division level, the CEC value is divided into 5 grades. Grade 1 is the most efficient (CEC ≥92%, standby power consumption ≤5W), Grade 2 (CEC 89%-91%, standby power consumption ≤8W), Grade 3 (CEC 86%-88%, standby power consumption ≤12W), Grade 4 (CEC 83%-85%, standby power consumption ≤15W), and Grade 5 is the access level (CEC ≥80%, standby power consumption ≤20W). At the same time, it is stipulated that the production of Grade 5 power supplies will be prohibited from 2026, and the sale of Grade 4 power supplies will be prohibited from 2028.
After the implementation of the standard, it will promote the improvement of industry energy efficiency: first, guiding technology research and development. Manufacturers need to optimize the topology structure (e.g., using LLC resonant topology to increase light load energy efficiency by 5%) and improve heat dissipation design (reducing heat dissipation losses); second, helping users select products. A semiconductor park purchased 100 Grade 1 energy efficiency power supplies, saving 120,000 kWh of electricity annually, equivalent to 96,000 yuan in electricity costs; third, standardizing market order, avoiding "false energy efficiency labeling", and promoting healthy competition in the industry.