Technical Articles
Opto-Electrical Synchronization System for Excimer Laser High-Voltage Power Supply
Excimer lasers, characterized by short wavelengths (193nm 248nm...
Single Event Effect Hardening for High-Voltage Power Supply in Lithography Machines
As the core equipment in semiconductor manufacturing, lithograp...
Energy Spatiotemporal Distribution Control of High-Voltage Power Supply for Ion Implantation
1 Process Requirements and Control DifficultiesIon implantatio...
Surface Microplasma Suppression of High-Voltage Power Supply for Electrostatic Chuck (ESC)
1 Application Scenario and Cause of the ProblemThe Electrost...
Power Supply of High-Voltage Power Supply for Electron Microscope to Superconducting Quantum Interference Device (SQUID)
1 Application Background and Technical RequirementsElectron mi...
Intelligent Process Window Optimization for High-Voltage Power Supply in Etching Equipment
Etching process is a key link in "pattern transfer" in semic...
Intelligent Discharge Channel Regulation for High-Voltage Power Supply in Excimer Lasers
Excimer lasers (e g , KrF, ArF lasers) are widely used in ...
Multi-resonant Cavity Cooperative Voltage Stabilization for High-Voltage Power Supply in Lithography Machines
In advanced semiconductor manufacturing, lithography machines, k...
Genetic Algorithm Optimization of Pulse Waveform for Ion Implantation High-Voltage Power Supplies
Ion implantation technology is the core process for achieving...