TESC7080
Teslaman TESC7080 series electrostatic chuck power supply is suitable for electrostatic chuck semiconductor processing applications. It can provide the required accurate voltage within 10ms and switch polarity within 1s. These customized designs provide protection during the semiconducting process. It can provide ground reference reversible output polarity, as well as floating ground bipolar output with related floating interface. Integrated troubleshooting circuits monitor power functions and transfer state data to the user interface. It adopts a compact and lightweight package and can be OEM.
Typical Application：E-Chuck
Reference Back to listFeatures
- Bi-polar output 20ms polarity switchable
- +24V DC input
- Analog/RS-485/Ethernet
- 100nf load detection
CONTACT US
Telephone：+86411-84754722
Mobile：+8615642371743
Wechat：15642371743
Email：chengxingqi@teslamanhv.com
URL：www.teslamanhv.com
Product Specifications
Input
+24VDC±5%,5A
Output Polarity
Floating, bi-polar, polarity switchable
Output Voltage
-5kV ~ +5kV each channel continuous adjustable
Voltage Accuracy
±1% of rated value
Ripple
Typical < 100mVp-p
Pass zero
Yes
Over-shoot
Typical < 2V (when load of 10nf, from -5kV to +5kV)
Response delay
<3ms
Frequency
0.5Hz
Switching time
Typical 20ms (when load of 10nf, from -5kV to +5kV)
Frequency
Typical 50Hz (when load of 10nf, from -5kV to +5kV)
Output Impedance
>20kΩ
Voltage Display
Resolution = 1V Accuracy better than ±50V
Current Display
Resolution = 10μA Accuracy = Actual value ±100μA Bias±2%
Stability
Better than 0.01%
Line regulation
<0.1% when input change within 10%
Load regulation
<1.3% when load from 0 to full load
Protection
Input over/less-voltage protection, input over-current protection. Output over-voltage over current and over temperature protection.
Interface
DB25 analog(standard), RS-485 series port, USB and Ethernet.
Control signal
0 corresponds to -5kV, 5V corresponds to 0V, 10V corresponds to +5kV (customizable)
Typical load capacitance Load detection
<10nF(For other capacitance, please contact Teslaman) <100nF
Temperature coefficient
Better than 300ppm/℃ Full load <0.1%p-p at maximum output.
Environmental
Operational
0˚C to 45˚C
Storage
-20˚C to 70˚C
Humidity
0 to 85%RH, non-condensing
Cooling
Convection