Anti-Vibration Design of High-Voltage Power Supplies for Exposure Machines

In the field of precision manufacturing, exposure machines are core equipment, and their requirements for the stability of high-voltage power supplies are extremely high. Vibration not only affects the reliability of the power supply itself but can also lead to a decrease in exposure accuracy and cause defects in micron-level circuit patterns. The anti-vibration design of high-voltage power supplies has therefore become a critical technical aspect for ensuring the overall machine's performance.
Vibration Source Analysis and Impact Mechanisms
Operations within exposure machines—such as the rapid movement of precision mechanical components, high-speed rotation of motors, and high-precision positioning of worktables—generate multidimensional vibrations. These vibrations are transmitted through the equipment structure to the high-voltage power supply module, potentially causing internal component loosening, connection failures, magnetic core displacement, and circuit board fractures. Particularly for the exposure process, which demands extremely high stability of high-voltage output, any voltage fluctuation can directly affect lithography quality.
Core Anti-Vibration Technical Solutions
1. Vibration Isolation System Design
Advanced exposure machines employ multi-stage vibration isolation systems. Damping pads made of rubber or silicone are installed between the power supply base and the mounting location to utilize their elasticity for reducing external vibration transmission. More precise solutions involve air spring vibration isolators, whose core is an airbag filled with compressed air. When vibrations occur, the airbag absorbs impact energy through the compression and expansion of air, enabling the natural vibration frequency of the isolation system to be as low as 0.5–1.5 Hz, effectively filtering out environmental micro-vibrations. System pressure must be precisely regulated based on equipment weight to achieve optimal stiffness and vibration isolation效果.
2. Internal Structure Optimization
The power supply internals adopt a combination of reinforced design and buffer materials. The overall strength and rigidity are enhanced by adding reinforcement materials such as metal plates. Meanwhile, buffer materials like foam and sponge are placed in key internal areas to absorb vibration energy. In terms of structural layout, the center of gravity balance principle is followed: heavier components such as transformers and large capacitors are placed as close as possible to the center of the circuit board to avoid vibration amplification due to uneven weight distribution.
3. Component Selection and Mounting Processes
Selecting components inherently resistant to vibration is crucial. Transformers should use magnetic core materials with high mechanical stability. For power devices, wide-bandgap semiconductor devices such as Gallium Nitride (GaN) and Silicon Carbide (SiC) can be selected; their inherent high mechanical strength helps improve vibration resistance. Component mounting requires a multi-point fixation strategy: for large and vibration-prone components, a combination of screw fastening and specialized adhesive bonding is used to ensure they do not loosen or detach under continuous vibration.
4. Environmental Adaptability and Reliability Verification
High-voltage power supplies for exposure machines must meet a wide temperature operating range (e.g., -40°C to +105°C) to ensure mechanical and electrical performance stability during temperature fluctuations. Product validation should reference standards such as EN 61373 and GB/T 21563, conducting tests that simulate actual vibration environments to ensure sufficient design margin.
Conclusion
The anti-vibration design of high-voltage power supplies for exposure machines is a systematic project that requires integrating multiple aspects including vibration isolation technology, structural optimization, component selection, and environmental adaptability design. By adopting multi-stage isolation solutions, internal structural reinforcement, and precision mounting processes, the reliability of the power supply in vibrating environments can be significantly enhanced. This provides a stable energy foundation for ultra-precision exposure processes, ultimately ensuring the quality and yield of micro-nano manufacturing products.