Optimization of High-Voltage Modules for Excimer Lasers

Excimer lasers are widely used in semiconductor lithography and precision micromachining. The high-voltage module is essential for controlling discharge energy, pulse frequency, and laser output stability. Optimization strategies focus on efficiency, pulse shaping accuracy, and fast response.
Pulse-generation techniques in modern excimer laser modules employ high-frequency switching to generate rapid voltage ramps, combined with energy storage capacitors for stabilization. By controlling pulse rise time and width, the electric field strength of each laser discharge is precisely regulated. Integrated voltage and current monitoring feedback ensures that every pulse is consistent, keeping energy fluctuation below 0.1%.
Electromagnetic shielding and multi-stage filtering reduce high-voltage noise that can degrade beam quality. Digital controllers adjust switching frequency and duty cycle in real time to maintain stable output under varying load conditions. Optimization of capacitor layout and minimization of parasitic inductances further improve efficiency and output precision. These measures ensure highly reliable and consistent laser performance.