Technical Articles
Research on Adaptive Regulation of High-Voltage Power Supply in Etching Equipment
In semiconductor manufacturing, the precision of etching proces...
Research on Key Technologies for High-Voltage Pulse Timing Optimization in Excimer Lasers
Excimer lasers, as core light sources in the ultraviolet band...
Anti-Interference Design of High-Voltage Power Supply for Lithography Machines
As the core equipment in semiconductor manufacturing, the stab...
Research and Application Progress in Low-Ripple Optimization of High-Voltage Power Supplies for Electron Microscopes
Ripple control in high-voltage power supplies is a core perfo...
Research and Application of Harmonic Suppression Technology for High-Voltage Power Supplies in Etching Equipment
Harmonic Generation Mechanisms and HazardsThe high-voltage power...
Modular Research on High-Voltage Power Supplies for Excimer Lasers
Excimer lasers, serving as core deep-ultraviolet light sources,...
Core Applications and Challenges of High-Voltage Drive Technology in Deep Ultraviolet Lithography Light Sources
As the core equipment in semiconductor manufacturing, the perf...
Transient Protection Design for High-Voltage Power Supplies in Ion Implantation
Ion implanters are critical equipment in semiconductor manufact...
Research on High-Voltage Insulating Materials for Electrostatic Chucks
Core Requirements for High-Voltage Insulating MaterialsElectrical...