Technical Articles
Optimization of Discharge Channels in High-Voltage Power Supplies for Excimer Lasers
Excimer lasers, as high-power ultraviolet light sources, play ...
Breakthrough in Multi-level Conversion Technology for High-Voltage Power Supplies in Lithography Machines
As the core equipment in integrated circuit manufacturing, the...
Intelligent Temperature Compensation Technology for Ion Implantation High-Voltage Power Supplies
1 Temperature Sensitivity of Ion Implantation ProcessesIon im...
Research on Plasma Noise Suppression in High-Voltage Power Supplies for Etching Equipment
Plasma noise is a core interference source in semiconductor e...
Research on Pre-ionization Control Technology in Excimer Laser High-Voltage Power Supplies
Excimer lasers (e g , ArF, KrF) serve as high-power pulsed ...
Research on Low-Ripple Resonant Topology for High-Voltage Power Supply in Lithography Machines
As the core equipment of semiconductor manufacturing, the expo...
Design and Application of Transient Overvoltage Protection Circuits for High-Voltage Power Supplies in Ion Implantation
Ion implantation is a critical process in semiconductor manufa...
High-Frequency Oscillation Suppression Technology in High-Voltage Power Supplies for Electrostatic Chucks
Electrostatic chucks, a core component in semiconductor manufac...
Breakthrough in Nanometer-Level Ripple Suppression Technology for High-Voltage Power Supplies in Electron Microscopy
The stability of high-voltage power supplies directly impacts ...