Technical Articles
Suppression Technology of Quantum Tunneling Effect in High-Voltage Power Supplies for Electron Microscopes
The high-resolution imaging capability of electron microscopes ...
Optimization of RF-DC Coupling for High-Voltage Power Supply in Etching Equipment
In the etching process of semiconductor manufacturing, the hig...
Application and Breakthrough of Multi-Pulse Dynamic Synchronization Technology for High-Voltage Power Supplies in Ion Implantation
In the evolution of advanced semiconductor manufacturing proces...
Nanoscale Surface Potential Regulation Technology of High-Voltage Power Supply for Electrostatic Chuck
In the field of precision manufacturing such as semiconductor...
Improvement of Energy Recovery Efficiency for High-Voltage Power Supplies in Ion Implantation
In the doping process of semiconductor manufacturing, ion impl...
Application and Technical Value of Intelligent Dynamic Voltage Equalization for High-Voltage Power Supply of Electrostatic Chuck
In the process of semiconductor manufacturing iterating toward...
Femtosecond-Level Temporal Resolution of High-Voltage Power Supplies for Electron Microscopes: Technological Breakthroughs and Application Expansion
In the technical system of electron microscopes (hereafter ref...
Construction and Application of Life Assessment Model for Electron Beam High-Voltage Power Supply
The large-scale application of electron beam technology in fie...
Digital Drive Solution for High-Voltage Power Supply in Lithography Exposure Machines: Technical Application and Performance Enhancement
In the lithography process of semiconductor manufacturing, the...