Technical Articles
Insulation Aging Monitoring in High-Voltage Power Supplies for Electrostatic Chucks: Techniques and Applications
In semiconductor manufacturing and electron microscopy, electros...
Rapid Shutdown Protection for Electron Microscope High-Voltage Power Supplies: The Safety Gate for Precision Equipment
In high-end scientific instruments such as electron microscopes...
Surge Suppression Methods for High-Voltage Power Supplies in Ion Implantation
In semiconductor manufacturing, the high-voltage power supply s...
Core Technologies for Arc Suppression in High-Voltage Power Supplies of Electrostatic Chucks
I Arc Generation Mechanism and HazardsIn semiconductor proces...
Research and Application of High-Precision Feedback Regulation Technology for High-Voltage Power Supplies in Electron Microscopes
The imaging quality of electron microscopes is directly depend...
High-Voltage Power Supply Energy Recovery Technology in Etching Equipment: Principles, Design, and Applications
1 Background and SignificanceEtching equipment is widely used...
Key Technologies for Repetition Rate Control in Excimer Laser High-Voltage Power Supplies
1 Technical Challenges at High Repetition RatesExcimer lasers...
Electromagnetic Shielding Design for High-Voltage Power Supplies in Electrostatic Chucks: Key Technologies and Applications
1 High-Voltage Power Supply Design: Core Challenges in Electro...
Low-Noise Topology Optimization of High-Voltage Power Supplies for Electron Microscopes
The resolution of electron microscopes (EM) critically depends...