Technical Articles
Research on Adaptive Resonant Compensation for High-Voltage Power Supplies in Lithography Systems
IntroductionAs the core equipment in semiconductor manufacturing...
Digital Twin Monitoring for High-Voltage Power Supplies in Ion Implantation: A New Paradigm for Precision and Reliability
Ion implantation technology is fundamental in semiconductor man...
Research on Transient Overshoot Suppression in High-Voltage Power Supplies for Electrostatic Chucks
In semiconductor manufacturing and precision instrument processi...
Ultra-Low Drift Design of High-Voltage Power Supplies for Electron Microscopes
In electron microscope (EM) systems, the stability of high-vol...
Optimization of High-Voltage Power Supply Impedance Matching in Etching Equipment
Key Technologies and ApplicationsIn semiconductor manufacturing,...
Intelligent Current Sharing Control for High-Voltage Power Supplies in Ion Implantation
AbstractIon implantation is a core process in semiconductor ma...
Electrostatic Chuck High-Voltage Power Supply Resonance Suppression Technology: Principles and Innovative Solutions
In semiconductor manufacturing, electrostatic chucks (ESCs) are...
High-Voltage Power Supplies for Ion Implantation: Light-Load Efficiency Mode—Technical Breakthroughs and Application Value
In semiconductor manufacturing and new material modification, i...
Insulation Aging Monitoring in High-Voltage Power Supplies for Electrostatic Chucks: Techniques and Applications
In semiconductor manufacturing and electron microscopy, electros...