Technical Articles
High-Voltage Power Supplies for Magnetron Sputtering of High-Entropy Alloy Coatings
The deposition of high-entropy alloy (HEA) coatings via magnet...
Fault Isolation and Reconfiguration of Capacitive Charging Power Supplies
Capacitive charging power supplies represent a critical compone...
Interlayer Remelting High-Voltage Strategy for Electron Beam Additive Manufacturing
Electron Beam Additive Manufacturing (EBAM), particularly for h...
High-Voltage Control for Multi-Signal Synchronous Acquisition in Scanning Electron Microscopy
Modern scanning electron microscopes (SEMs) are multi-modal ana...
High-Voltage Feedback for Excimer Laser Beam Stability
Excimer lasers, operating in the deep ultraviolet spectrum, ar...
High-Voltage Adaptation for Ultra-Low Temperature Wafer Cooling in Ion Implantation
Ion implantation processes for advanced semiconductor nodes, pa...
Proximity Effect Model Correction Power Source for Electron Beam Lithography
Electron beam lithography (EBL) is the workhorse for manufactu...
High-Voltage Design for Multilayer Ceramic Electrodes in Electrostatic Chucks
Electrostatic chucks (ESCs) are the principal wafer-clamping te...
Intelligent Anti-Interference Filtering Technology for PPM-Level Power Supplies
In precision scientific instrumentation, semiconductor manufactur...