Technical Articles
Research on Discharge Delay Correction of Excimer Laser High-Voltage Power Supply
AbstractExcimer lasers play an irreplaceable role in semiconduc...
Electromagnetic Compatibility Enhancement Scheme for High-Voltage Power Supplies in Lithography Machines
As core equipment in semiconductor manufacturing, the electroma...
Dynamic Load Compensation in High-Voltage Power Supplies for Ion Implantation: A Core Breakthrough in Precision Manufacturing
In semiconductor manufacturing, ion implantation is a critical...
Research on Dielectric Loss Suppression in High-Voltage Power Supplies for Electrostatic Chucks
In semiconductor manufacturing, electrostatic chucks (ESCs) util...
The Rapid Pulse of High Voltage: Analyzing Sub-Millisecond Response Technology in EM High-Voltage Power Supplies
The revealing power of electron microscopy (EM) into the micr...
Multi-Stage Isolation Design for High-Voltage Power Supplies in Lithography Machines
IntroductionAs a core equipment in semiconductor manufacturing,...
Innovation and Applications of Gradient Boosting Technology in Ion Implantation High-Voltage Power Supplies
1 Technical Principle and Core MechanismGradient boosting tec...
Breakdown Protection Mechanisms in High-Voltage Power Supplies for Electrostatic Chucks
Electrostatic chucks, essential for wafer fixation in semicondu...
Strategies for Improving Energy Efficiency Ratio of High-Voltage Power Supplies in Ion Implantation
Ion implantation technology is a core process in semiconductor...