Technical Articles

Electrostatic Chuck Double-Side Clamping High-Voltage Balance Power Supply

Modern plasma etch and chemical vapor deposition processes pla...

Ion Implantation Ultra-Low Energy High-Voltage Deceleration Power Supply

In advanced semiconductor manufacturing processes, ion implantat...

Integrated Power Solutions for Humidity Control in Electrospinning Process Chambers

Electrospinning is a versatile and widely adopted technique fo...

Composite High-Voltage Power System for Ion Beam Assisted Vacuum Deposition

Ion beam assisted deposition represents a significant leap in...

High-Voltage Power Supply for Pulsed Reactive Gas Introduction in Magnetron Sputtering

Magnetron sputtering is a cornerstone physical vapor deposition...

Capacitor Charging Power Supply Matrix Parallel Module

Capacitor charging power supplies represent a critical class o...

High-Voltage Control for Passivation Steps in Bosch Deep Silicon Etching Processes

The Bosch process, a time-multiplexed deep reactive ion etchin...