Research on High-Frequency Technology of High-Voltage Power Supplies for Exposure Machines

As a core component of exposure machines, the performance of high-voltage power supplies directly determines exposure accuracy, energy efficiency, and system stability. Traditional line-frequency high-voltage power supplies suffer from large size, slow response, and low control precision, making it difficult to meet the increasingly stringent requirements of modern semiconductor manufacturing for exposure processes. High-frequency technology in high-voltage power supplies elevates the operating frequency from line frequency (50/60 Hz) to kilohertz (kHz) or even megahertz (MHz) levels. By leveraging high-frequency switching topologies (e.g., LLC resonant converters), wide-bandgap semiconductor devices (such as silicon carbide and gallium nitride), and digital control strategies, it achieves a leap in power supply performance.
High-frequency technology first significantly enhances power density and efficiency. By increasing the switching frequency, the volume of transformers and filtering components is greatly reduced, making the power supply system more compact and adaptable to the limited space within exposure machines. Meanwhile, the application of soft-switching technology reduces switching losses, enabling efficiencies of over 95%, minimizing heat generation, and lowering the complexity of cooling systems. Secondly, high-frequency power supplies exhibit faster dynamic response and higher output accuracy. Exposure processes require high-voltage power supplies to adjust output voltage rapidly (within microseconds) to cope with complex exposure scenarios and sudden load changes. The high-frequency design ensures voltage stability by reducing output ripple (to below 0.005%), avoiding exposure defects caused by voltage fluctuations. Additionally, high-frequency power supports multi-mode output (e.g., DC, pulses, and customizable waveforms), which can be programmed to adapt to different materials and process requirements, enhancing the flexibility and applicability of exposure machines.
In exposure machines, the technical challenges of high-frequency high-voltage power supplies primarily focus on electromagnetic compatibility (EMC) design, insulation reliability, and thermal management. High-frequency switching generates electromagnetic interference (EMI), which may affect the operation of precision optics and sensors in exposure machines. This necessitates suppression through shielding, filtering, and grounding optimization. Simultaneously, insulation design under high voltage must ensure no breakdown or leakage in high-frequency environments. Thermal management becomes critical due to high power density, requiring efficient cooling methods (e.g., air or liquid cooling) to ensure longevity and stability.
In the future, high-frequency technology for high-voltage power supplies in exposure machines will evolve toward intelligence and integration. By incorporating artificial intelligence algorithms, power supplies can achieve adaptive voltage adjustment, fault prediction, and energy efficiency optimization. The application of third-generation semiconductors will further push switching frequencies to MHz levels while reducing volume by over 40%. Moreover, modular design allows for power expansion by paralleling or series-connecting multiple units to meet higher demands, such as large-area panel display exposure or advanced packaging lithography.
In summary, high-frequency technology in high-voltage power supplies is a key driver for exposure machines to achieve higher precision, efficiency, and reliability. Its continued innovation will have a profound impact on semiconductor manufacturing, micro-nano processing, and related fields.