E-Chuck Recommended Products

TESC7080_DC HV Power Supply

TESC7080

Ground Reference Reversible Output ,Central point monitoring ,Analog quantity control ,485 control ,Ethernet control

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TMPS6065_Modular HV Power Supply

TMPS6065

Analog voltage programming ,Output power 10W ,Voltage and current monitoring ,High stability ,Low ripple and noise ,Compact design

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E-Chuck_Electrostatic Application

E-Chuck

An electrostatic chuck is a super-clean wafer carrier suitable for vacuum or plasma environments. It uses the principle of electrostatic adsorption to hold ultra-thin wafers flat and uniformly. This product is widely used in high-end semiconductor manufacturing equipment such as PVD, PECVD, ETCH, EUVL, and ion implantation.