Technical Articles
Methods for Suppressing Radiation Noise in High-Voltage Power Supplies of Lithography Machines
Lithography machines, as core equipment in semiconductor manufa...
Dynamic Voltage Compensation System for High-Voltage Power Supplies in Ion Implantation: Technology and Applications
In semiconductor manufacturing, ion implantation equipment is a...
Research on Dielectric Interface Optimization of High-Voltage Power Supply for Electrostatic Chucks
The performance of electrostatic chucks (ESC), a core componen...
Precision Enhancement Schemes for High-Voltage Power Supplies in Excimer Lasers
Excimer lasers, as core deep-ultraviolet light sources, are in...
Research on Transient Recovery Characteristics of High-Voltage Power Supplies for Lithography Machines
In semiconductor manufacturing, the precision of lithography ma...
Multi-Stage Filter Network Design for High-Voltage Power Supplies in Ion Implantation
Ion implantation technology is a critical process in semicondu...
Optimization of Arc Detection Algorithms for High-Voltage Power Supplies in Electrostatic Chucks
Electrostatic chucks, core components in semiconductor manufactu...
Adaptive Pulse Modulation in High-Voltage Power Supplies for Ion Implantation: A Breakthrough in Precision Manufacturing
In semiconductor manufacturing, material surface modification, a...
Research on Multi-Parameter Collaborative Control of High-Voltage Power Supply in Semiconductor Etching Equipment
IntroductionPlasma etching is a core process determining device...