Technical Articles
High-Voltage Control for High-Aspect-Ratio Features in Reactive Ion Etching
Reactive Ion Etching is a foundational process in semiconducto...
Synchronized High-Voltage Shielding for Laser Marking on Ampoules
Laser marking of pharmaceutical containers, such as glass ampo...
High-Voltage Fast-Insertion Systems for Accelerator Beam Stoppers
In particle accelerator facilities, the ability to rapidly and...
High-Voltage Strategy for Thermal Stress Relief in Electron Beam Powder Bed Fusion
Electron Beam Powder Bed Fusion (EB-PBF) is a metal additive...
High-Voltage Optimization for Low-Voltage Backscattered Electron Imaging in Scanning Electron Microscopy
Backscattered electron (BSE) imaging in a scanning electron mi...
Real-Time High-Voltage Correction for Excimer Laser Beam Quality
Excimer lasers are the workhorses of deep ultraviolet lithogra...
High-Voltage Synergistic Control for Defect Engineering in Ion Implantation
Ion implantation is a cornerstone process in semiconductor man...
High-Voltage Precision Control for Gray-Scale Direct Write in Electron Beam Lithography
Electron beam lithography is the workhorse for creating the p...
RF-DC Composite High-Voltage Power Supply for Electrostatic Chucks
In modern semiconductor plasma processing equipment, such as e...