Technical Articles
Independent Ion Energy Control Technology of Dual Frequency High Voltage Bias Power Supply for Atomic Layer Etching Equipment
Atomic layer etching removes material layer by layer with ato...
Power Consumption Optimization of High Voltage Discharge Power Supply for Gas Purification System of Excimer Laser
Excimer lasers generate ultraviolet light through electrical di...
Miniature High Voltage Ionization Power Supply Design for Contamination Monitoring Sensor in Extreme Ultraviolet Lithography
Extreme ultraviolet lithography uses 13 5 nanometer wavelength...
Nonlinear Distortion Compensation Algorithm of Beam Scanning High Voltage Deflection Power Supply for Ion Implanter
Ion implanters inject ions into semiconductor wafers to modify...
Transient Thermal Management Research of Electrostatic Chuck High Voltage Power Supply in Semiconductor Rapid Annealing Process
Semiconductor rapid thermal annealing processes heat wafers to...
Megawatt Level Power Control Challenge of High Voltage Power Supply for Future Fusion Device
Fusion energy research aims to develop reactors that harness ...
Dynamic Load Adaptability and Efficiency Optimization of High Voltage Power Supply for Radar System
Radar systems require high voltage power supplies to operate ...
Adaptive and Robustness Research of Intelligent Control Algorithm for High Voltage Power Supply
Intelligent control algorithms for high voltage power supplies...
Emission Reduction Effect and Economy of High Voltage Electrostatic Power Supply for Industrial Boiler Flue Gas
Industrial boilers generate steam and heat for manufacturing p...