Technical Articles
Multi-Physical Field Co-Simulation for High-Voltage Power Supply of Electrostatic Chucks
Abstract:As semiconductor manufacturing advances toward sub-nanom...
Technical Breakthroughs and Applications of Gas Discharge Control in Excimer Laser High-Voltage Power Supplies
Excimer lasers (e g , ArF, KrF) serve as core deep-ultraviol...
Harmonic Resonance Protection in High-Voltage Power Supplies for Lithography Machines
As the core equipment of semiconductor manufacturing, the stab...
Fault Prediction Algorithms for High-Voltage Power Supplies in Ion Implantation: Applications and Advances
Ion implantation is a core process in semiconductor manufactur...
Monitoring Contact Resistance in High-Voltage Power Supplies for Electrostatic Chucks
In semiconductor manufacturing, electrostatic chucks (ESC) hold...
Technical Evolution and Application Value of Distributed Power Architecture for High-Voltage Supplies in Electron Microscopes
1 Core Requirements of HV Power for Electron MicroscopesThe...
Research on Adaptive Resonant Compensation for High-Voltage Power Supplies in Lithography Systems
IntroductionAs the core equipment in semiconductor manufacturing...
Digital Twin Monitoring for High-Voltage Power Supplies in Ion Implantation: A New Paradigm for Precision and Reliability
Ion implantation technology is fundamental in semiconductor man...
Research on Transient Overshoot Suppression in High-Voltage Power Supplies for Electrostatic Chucks
In semiconductor manufacturing and precision instrument processi...