Technical Articles

Real-Time High-Voltage Correction for Excimer Laser Beam Quality

Excimer lasers are the workhorses of deep ultraviolet lithogra...

High-Voltage Synergistic Control for Defect Engineering in Ion Implantation

Ion implantation is a cornerstone process in semiconductor man...

High-Voltage Precision Control for Gray-Scale Direct Write in Electron Beam Lithography

Electron beam lithography is the workhorse for creating the p...

RF-DC Composite High-Voltage Power Supply for Electrostatic Chucks

In modern semiconductor plasma processing equipment, such as e...

Self-Recovering Fault-Tolerant Design for PPM-Level High-Voltage References

In the world of precision high-voltage instrumentation, the vo...

Arc Monitoring and Target Erosion Detection in High-Voltage Power Supplies for Coating

Magnetron sputtering and arc-based physical vapor deposition ar...

Adaptive High-Voltage Following for Electrostatic Spraying on Complex Curved Surfaces

Electrostatic spraying has revolutionized industrial coating, ag...

High-Voltage Compensation for Gain Drift in Channel Electron Multipliers

Channel Electron Multipliers (CEMs) are ubiquitous detectors in...