Technical Articles

Power-Adaptive High-Voltage Energy-Saving Control for Electrostatic Chucks

Electrostatic chucks (ESCs) are ubiquitous in semiconductor fab...

Synergistic High-Voltage for Ion Implantation Impurity Activation Annealing

Ion implantation, a cornerstone of semiconductor doping, introd...

Thin Film Nanostructure Control via Pulsed Power Supplies in Deposition Processes

The transition from conventional DC to pulsed power delivery ...

Accelerated Long-Term Stability Testing for Parts-Per-Million Level Power Supplies

The validation of long-term stability for precision high-voltag...

Closed-Loop High-Voltage Control for Neutron Generator Beam Current Intensity

The regulation of beam current intensity in compact neutron g...

Precursor Injection Systems for Atomic Layer Etching: The Role of Pulsed High Voltage Drives

Atomic layer etching represents a significant advancement in n...

Independent Controllable High-Voltage Module for Multi-Needle Electrospinning

Electrospinning is a versatile technique for producing micro- ...