Technical Articles
Power-Adaptive High-Voltage Energy-Saving Control for Electrostatic Chucks
Electrostatic chucks (ESCs) are ubiquitous in semiconductor fab...
Synergistic High-Voltage for Ion Implantation Impurity Activation Annealing
Ion implantation, a cornerstone of semiconductor doping, introd...
Thin Film Nanostructure Control via Pulsed Power Supplies in Deposition Processes
The transition from conventional DC to pulsed power delivery ...
Accelerated Long-Term Stability Testing for Parts-Per-Million Level Power Supplies
The validation of long-term stability for precision high-voltag...
Closed-Loop High-Voltage Control for Neutron Generator Beam Current Intensity
The regulation of beam current intensity in compact neutron g...
Precursor Injection Systems for Atomic Layer Etching: The Role of Pulsed High Voltage Drives
Atomic layer etching represents a significant advancement in n...
High-Voltage System Integration for Ampoule Seal Integrity Testing via Helium Mass Spectrometry
The assurance of container integrity is paramount in the phar...
High Voltage Power Supply for Accelerator Beam Dump Systems: Principles and Application Considerations
Within particle accelerator facilities, the beam dump or beam...
Independent Controllable High-Voltage Module for Multi-Needle Electrospinning
Electrospinning is a versatile technique for producing micro- ...