Technical Articles

Modular Research on High-Voltage Power Supplies for Excimer Lasers

Excimer lasers, serving as core deep-ultraviolet light sources,...

Transient Protection Design for High-Voltage Power Supplies in Ion Implantation

Ion implanters are critical equipment in semiconductor manufact...

Research on High-Voltage Insulating Materials for Electrostatic Chucks

Core Requirements for High-Voltage Insulating MaterialsElectrical...

Precision Control Technology for High-Voltage Power Supplies in Electron Microscopy

Electron microscopy (EM), a core tool for nanoscale observatio...

Key Design of High-Frequency High-Voltage Power Supplies for Semiconductor Etching Equipment

Technical PrinciplesHigh-frequency high-voltage power supplies ar...

Research on EMI Suppression Technology for High-Voltage Power Supplies in Lithography Machines

IntroductionThe high-voltage power supply (typically requiring k...