Technical Articles

Research on Key Technologies for High-Voltage Pulse Timing Optimization in Excimer Lasers

Excimer lasers, as core light sources in the ultraviolet band...

Anti-Interference Design of High-Voltage Power Supply for Lithography Machines

As the core equipment in semiconductor manufacturing, the stab...

Modular Research on High-Voltage Power Supplies for Excimer Lasers

Excimer lasers, serving as core deep-ultraviolet light sources,...

Transient Protection Design for High-Voltage Power Supplies in Ion Implantation

Ion implanters are critical equipment in semiconductor manufact...

Research on High-Voltage Insulating Materials for Electrostatic Chucks

Core Requirements for High-Voltage Insulating MaterialsElectrical...

Precision Control Technology for High-Voltage Power Supplies in Electron Microscopy

Electron microscopy (EM), a core tool for nanoscale observatio...