Technical Articles
Production Process Control: Automated Monitoring Upgrade of High-Voltage Power Supplies
High-voltage power supplies (HVPS) are critical components in ...
Intelligent Regulation of Plasma Sheath for High-Voltage Power Supplies in Etching Equipment
In the semiconductor etching process, the characteristics of t...
Gas Dynamics Optimization for High-Voltage Power Supplies in Excimer Lasers
Excimer lasers, with their short-wavelength characteristics (193...
Multi-Dimensional EMI Shielding for High-Voltage Power Supplies in Lithography Machines
As the core equipment in semiconductor manufacturing, lithograp...
Application Practice of Pulse Sequence Chaos Control in Ion Implantation High-Voltage Power Supplies
Ion implantation is a core process for achieving precise impu...
Intelligent Dielectric Loss Compensation Technology for Electrostatic Chuck High-Voltage Power Supplies and Its Applications
In key processes of semiconductor wafer manufacturing such as...
Application Exploration of Avogadro Constant-Level Precision in Electron Microscope High-Voltage Power Supplies
In the fields of nanotechnology and materials science, the re...
Multi-Parameter Coupling Decoupling Control for High-Voltage Power Supply in Etching Equipment
In dry etching equipment, HVPS needs to simultaneously regulat...
Opto-Electrical Synchronization System for Excimer Laser High-Voltage Power Supply
Excimer lasers, characterized by short wavelengths (193nm 248nm...