Technical Articles
Intelligent Gradient Boost Technology for High-Voltage Power Supplies in Ion Implantation: A New Engine for Precision Manufacturing
Ion implantation technology is a core process in semiconductor...
Real-Time Monitoring of Dielectric Loss in High-Voltage Power Supplies for Electrostatic Chucks
Key Technologies and ApplicationsIn semiconductor manufacturing,...
Application of Superconducting Magnetic Energy Storage in Voltage Stabilization for Electron Microscope High-Voltage Power Supplies
Electron microscopes require extremely stringent voltage stabili...
Application of High-Voltage Power Supplies in Plasma Resonance Suppression for Etching Equipment
Plasma resonance is a common challenge in semiconductor etchin...
Key Technologies for Improving Discharge Uniformity in Excimer Laser High-Voltage Power Supplies
Excimer lasers (e g , ArF, KrF) are indispensable deep-ultrav...
Breakthroughs in Wide-Range Regulation Technology for Electron Beam High-Voltage Power Supplies
The core of electron beam processing technology (welding, clad...
Digital Transformation of High-Voltage Power Supplies for Exposure Machines
AbstractAs semiconductor manufacturing advances toward nanoscale...
Fault Diagnosis System for Electron Beam High-Voltage Power Supply: Technologies and Applications
Electron beam high-voltage power supplies are critical componen...
Research on Lifespan Extension Technologies for High-Voltage Power Supplies in Exposure Equipment
Exposure equipment, as a core device in semiconductor manufact...