Technical Articles
160 kV Sub-ppm Ripple High-Voltage Power Supply for Lithography E-Chucks
Holding 300 mm wafers with sub-micron flatness during EUV and...
320 kV Marx Generator Upgrade for Particle Accelerator Systems
Legacy air-insulated Marx generators originally commissioned in...
-800 V Pulsed Bias Power Supply for Magnetron Sputtering in Coating Systems
Reactive magnetron sputtering of high-quality optical filters a...
30 kV Miniature High-Voltage Module for Capillary Electrophoresis Lab-on-Chip
Portable and point-of-care capillary electrophoresis chips requi...
450 kV Grid-Controlled High-Voltage Power Supply for Electron-Beam Melting
Electron-beam melting of reactive alloys such as titanium alum...
E-Chuck Dedicated Reverse-Pulse High-Voltage Circuit for De-Chucking
Rapid and particle-free wafer release from bipolar electrostati...
RF Matching High-Voltage Bias Supply for Ion Beam Etching Systems
Precision ion beam etching of compound semiconductor devices a...
100 kV Integrated High-Voltage Module for Electrostatic Spray Robots
Industrial painting robots require the high-voltage generator t...
225 kV Radiation-Hardened High-Voltage Power Supply for Neutron Radiography
Neutron radiography facilities operating near research reactors...