Technical Articles

High-Voltage Control for Sidewall Morphology in Reactive Ion Deep Etching

Reactive Ion Etching (RIE), and particularly its deep variant...

High-Speed Visual Positioning and High-Voltage Triggering for Ampoule Filling

In high-speed pharmaceutical filling lines for injectable medic...

High-Voltage Exchange System for Accelerator Beam Stripping Foils

Within the injector chains of medium to high-energy particle ...

Power Supply Optimization for Support Structure Fabrication in Electron Beam Selective Melting

Electron Beam Selective Melting for metal additive manufacturin...

High-Voltage Phase-Locked Power Systems for Excimer Laser Repetition Rate Control

Excimer lasers, operating on transitions of rare gas-halide mo...

Synchronized High-Voltage Power Supply for Ion Implantation and Rapid Thermal Annealing

The ion implantation process introduces dopant atoms and latti...

High-Voltage Regulation for Chemical Amplification in Electron Beam Resist

In electron beam lithography for semiconductor manufacturing, c...

Adaptive High-Voltage Power Supply for Electrostatic Chucks Accommodating Wafer Warpage

Modern semiconductor fabrication utilizes wafers that are incre...