Technical Articles
Multi-Phase High-Voltage Drive Strategy for Zoned Electrostatic Chucks
Electrostatic chucks (ESCs) are essential for wafer clamping i...
Closed-Loop High-Voltage Control for Ion Implantation Dose Uniformity
Ion implantation is a critical doping process in semiconductor...
Multilayer Film Interface Passivation with Pulsed Power Supplies in Deposition
The performance of advanced functional coatings, such as those...
Wide-Temperature-Range Precision Compensation for Parts-Per-Million Level Power Supplies
Achieving and maintaining parts-per-million (PPM) level stabilit...
High-Voltage Modulation Technology for Neutron Tube Beam Pulsing
The generation of pulsed neutron beams from compact sealed-tub...
Environmental Airflow-Assisted High-Voltage Control for Electrospinning Systems
Electrospinning is a versatile technique for producing polymer...
High-Voltage Lens Systems for Collision Cell Energy Focusing in Mass Spectrometers
In tandem mass spectrometry, particularly with triple quadrupol...
High-Voltage Excitation Sources for Plastic Sorting via Terahertz Spectroscopy
The recycling of plastic waste presents a significant technolo...
Pulsed Substrate Bias for Ion Plating in Vacuum Deposition
Ion plating is a variant of physical vapor deposition where ...