Technical Articles

Research on EMI Suppression Technology for High-Voltage Power Supplies in Lithography Machines

IntroductionThe high-voltage power supply (typically requiring k...

Key Role of Dynamic Response Characteristics of High-Voltage Power Supplies in Etching Processes

Correlation Between Dynamic Response and Etching AccuracyIn sem...

Enhancing High-Voltage Power Supply Efficiency for Excimer Lasers

Excimer lasers, as core deep-ultraviolet (DUV) light sources, ...

Reliability Analysis of High-Voltage Modules in Ion Implanters

As core equipment in semiconductor manufacturing, the high-volt...

Design Challenges of High-Voltage Power Supplies for Etching Equipment

In semiconductor manufacturing, plasma etching is a critical p...