Technical Articles
English Translation: Research on Transient Arc Suppression Algorithms for High-Voltage Power Supplies in Electrostatic Chucks
The electrostatic chuck (ESC), a core component in semiconduct...
Quantum Voltage Stabilization Technology: Ushering in a New Era for Electron Microscope High-Voltage Power Supplies
In electron microscopy (EM), the stability of high-voltage pow...
Expanding Process Windows in Etching Equipment: High-Voltage Power Supply Innovations
In semiconductor manufacturing, plasma etching is a core proce...
Intelligent Power Allocation for High-Voltage Power Supplies in Ion Implantation
1 Core Requirements of Ion Implantation ProcessesIon impl...
Influence of Surface Modification on High-Voltage Power Supplies for Electrostatic Chucks
IntroductionElectrostatic chucks (ESCs), critical components in ...
High-Voltage Power Supply Scheme for Electron Microscopes Based on Superconducting Energy Storage: A Revolution in Precision and Stability
In high-end scientific instruments such as electron microscopes...
Dynamic Impedance Matching of High-Voltage Power Supplies in Plasma Etching Equipment
In semiconductor manufacturing, the stability of plasma etching...
Optimization of Excimer Laser High-Voltage Power Supply Pulse Trains: Technology and Applications
In excimer laser systems, the quality of high-voltage power s...
Multi-Zone Independent Control of High-Voltage Power Supplies for Electrostatic Chucks: Technology and Applications
As semiconductor manufacturing advances toward higher precision...