Technical Articles
Improvement of Energy Recovery Efficiency for High-Voltage Power Supplies in Ion Implantation
In the doping process of semiconductor manufacturing, ion impl...
Application and Technical Value of Intelligent Dynamic Voltage Equalization for High-Voltage Power Supply of Electrostatic Chuck
In the process of semiconductor manufacturing iterating toward...
Femtosecond-Level Temporal Resolution of High-Voltage Power Supplies for Electron Microscopes: Technological Breakthroughs and Application Expansion
In the technical system of electron microscopes (hereafter ref...
Construction and Application of Life Assessment Model for Electron Beam High-Voltage Power Supply
The large-scale application of electron beam technology in fie...
Digital Drive Solution for High-Voltage Power Supply in Lithography Exposure Machines: Technical Application and Performance Enhancement
In the lithography process of semiconductor manufacturing, the...
Key Points for Anti-Impact Design of High-Voltage Power Supplies for Electron Beams
The application of electron beam technology is increasingly wi...
Application and Process Value of Load Balancing Technology for Exposure Machine High-Voltage Power Supply
In the semiconductor lithography process, the exposure machine,...
Application and Technical Value of Intelligent Monitoring System for Electron Beam High-Voltage Power Supply
With the rapid penetration of electron beam technology in fie...
Radiation-Resistant Shielding Structure Design and Application for High-Voltage Power Supplies in Lithography Machines
In the manufacturing of semiconductor nanoscale processes, lith...