Technical Articles
High-Voltage Feedback for Excimer Laser Beam Stability
Excimer lasers, operating in the deep ultraviolet spectrum, ar...
High-Voltage Adaptation for Ultra-Low Temperature Wafer Cooling in Ion Implantation
Ion implantation processes for advanced semiconductor nodes, pa...
Proximity Effect Model Correction Power Source for Electron Beam Lithography
Electron beam lithography (EBL) is the workhorse for manufactu...
High-Voltage Design for Multilayer Ceramic Electrodes in Electrostatic Chucks
Electrostatic chucks (ESCs) are the principal wafer-clamping te...
Intelligent Anti-Interference Filtering Technology for PPM-Level Power Supplies
In precision scientific instrumentation, semiconductor manufactur...
Arc and Plasma Diagnostics for High-Voltage Power Supplies in Coating Processes
In physical vapor deposition (PVD) processes such as magnetron...
High-Voltage Emergency Stop for Collision Prevention in Electrostatic Spraying Robots
The integration of high-voltage electrostatic technology into a...
High-Voltage Strategy for Channel Electron Multiplier Lifespan Extension
Channel Electron Multipliers (CEMs), and their curved variant ...
Active Ripple Elimination for 320kV DC High-Voltage Power Supplies
In applications demanding ultra-stable high-voltage DC fields, ...