Technical Articles
Key Role of High-Voltage Power Supply Process Parameter Coupling in Etching Equipment
In semiconductor manufacturing, plasma etching is a critical p...
Key Technologies for Extending Electrode Lifespan in Excimer Laser High-Voltage Power Supplies
Excimer lasers, as core light sources in the deep ultraviolet...
Rapid Localization of High-Voltage Power Supply Failures in Lithography Machines
As a core equipment in semiconductor manufacturing, the stabil...
Ultra-Low EMI Shielding Structure for High-Voltage Power Supplies in Electron Microscopes
The resolution and imaging quality of electron microscopes (EM...
Dynamic Bias Modulation of High-Voltage Power Supplies in Etching Equipment: Core Breakthrough in Precision Control
In semiconductor manufacturing, the nanoscale pattern transfer ...
Optimization of Discharge Channels in High-Voltage Power Supplies for Excimer Lasers
Excimer lasers, as high-power ultraviolet light sources, play ...
Breakthrough in Multi-level Conversion Technology for High-Voltage Power Supplies in Lithography Machines
As the core equipment in integrated circuit manufacturing, the...
Intelligent Temperature Compensation Technology for Ion Implantation High-Voltage Power Supplies
1 Temperature Sensitivity of Ion Implantation ProcessesIon im...
Research on Plasma Noise Suppression in High-Voltage Power Supplies for Etching Equipment
Plasma noise is a core interference source in semiconductor e...