Technical Articles
Modular Research on High-Voltage Power Supplies for Excimer Lasers
Excimer lasers, serving as core deep-ultraviolet light sources,...
Core Applications and Challenges of High-Voltage Drive Technology in Deep Ultraviolet Lithography Light Sources
As the core equipment in semiconductor manufacturing, the perf...
Transient Protection Design for High-Voltage Power Supplies in Ion Implantation
Ion implanters are critical equipment in semiconductor manufact...
Research on High-Voltage Insulating Materials for Electrostatic Chucks
Core Requirements for High-Voltage Insulating MaterialsElectrical...
Precision Control Technology for High-Voltage Power Supplies in Electron Microscopy
Electron microscopy (EM), a core tool for nanoscale observatio...
Key Design of High-Frequency High-Voltage Power Supplies for Semiconductor Etching Equipment
Technical PrinciplesHigh-frequency high-voltage power supplies ar...
High-Voltage Pulse Modulation in Excimer Lasers: Core Breakthroughs in Precision Energy Control
I Technical Principles and Core ChallengesExcimer lasers util...