Technical Articles
Design of High-Voltage Power Supply for Electrostatic Chucks: Key Technologies in Multi-Layer Dielectric Withstand Voltage
1 Design Logic and Challenges of Multi-Layer StructuresElectr...
High-Voltage Power Supply for Electron Microscopy: Femtosecond Pulse Modulation Technology
Electron microscopy (EM), a cornerstone tool for exploring mat...
Ultra-High-Frequency Resonant Voltage Stabilization Technology for Lithography Machine High-Voltage Power Supplies
In semiconductor manufacturing, lithography machines are core e...
Gradient Boost Dynamic Control for High-Voltage Power Supplies in Ion Implantation
Ion implantation technology, as a core process in semiconducto...
English Translation: Research on Transient Arc Suppression Algorithms for High-Voltage Power Supplies in Electrostatic Chucks
The electrostatic chuck (ESC), a core component in semiconduct...
Quantum Voltage Stabilization Technology: Ushering in a New Era for Electron Microscope High-Voltage Power Supplies
In electron microscopy (EM), the stability of high-voltage pow...
Expanding Process Windows in Etching Equipment: High-Voltage Power Supply Innovations
In semiconductor manufacturing, plasma etching is a core proce...
Intelligent Power Allocation for High-Voltage Power Supplies in Ion Implantation
1 Core Requirements of Ion Implantation ProcessesIon impl...
Influence of Surface Modification on High-Voltage Power Supplies for Electrostatic Chucks
IntroductionElectrostatic chucks (ESCs), critical components in ...