Technical Articles

High-Voltage Power Supply for Electron Microscopy: Femtosecond Pulse Modulation Technology

Electron microscopy (EM), a cornerstone tool for exploring mat...

Gradient Boost Dynamic Control for High-Voltage Power Supplies in Ion Implantation

Ion implantation technology, as a core process in semiconducto...

Expanding Process Windows in Etching Equipment: High-Voltage Power Supply Innovations

In semiconductor manufacturing, plasma etching is a core proce...

Intelligent Power Allocation for High-Voltage Power Supplies in Ion Implantation

1 Core Requirements of Ion Implantation ProcessesIon impl...

Influence of Surface Modification on High-Voltage Power Supplies for Electrostatic Chucks

IntroductionElectrostatic chucks (ESCs), critical components in ...