Technical Articles
High-Voltage Power Supply Energy Recovery Technology in Etching Equipment: Principles, Design, and Applications
1 Background and SignificanceEtching equipment is widely used...
Key Technologies for Repetition Rate Control in Excimer Laser High-Voltage Power Supplies
1 Technical Challenges at High Repetition RatesExcimer lasers...
Electromagnetic Shielding Design for High-Voltage Power Supplies in Electrostatic Chucks: Key Technologies and Applications
1 High-Voltage Power Supply Design: Core Challenges in Electro...
Low-Noise Topology Optimization of High-Voltage Power Supplies for Electron Microscopes
The resolution of electron microscopes (EM) critically depends...
Innovation and Application of Self-Recovery Technology for High-Voltage Power Supply Failures in Etching Equipment
In semiconductor manufacturing, etching equipment relies on hig...
Research on Pulse Shaping of High-Voltage Power Supply for Excimer Lasers
1 IntroductionExcimer lasers, characterized by short wavelengths...
Multi-Stage Voltage Regulation Scheme for High-Voltage Power Supplies in Lithography Machines
As the core equipment of semiconductor manufacturing, lithograp...
Multidimensional Pathways and Technological Evolution in Efficiency Optimization of Ion Implantation High-Voltage Power Supplies
Ion implantation technology is a core process in semiconductor...
Intelligent Diagnostics for Electrostatic Chuck High-Voltage Power Supplies: Revolutionizing Precision Monitoring and Fault Prediction
The electrostatic chuck (ESC), a critical component in semicon...