Technical Articles

Dynamic Charge Balance on High-Voltage Power Supply for Electrostatic Chucks

1 Working Principle and Foundation of Dynamic Charge Balance...

High-Voltage Power Supply for Lithography Machines: Shielding Against Particle Interference

In semiconductor manufacturing, lithography machines are core e...

Intelligent Dynamic Voltage Balancing for High-Voltage Power Supplies in Ion Implantation

In semiconductor manufacturing, optical coating, and material s...

High-Voltage Power Supply for Electron Microscopy: Femtosecond Pulse Modulation Technology

Electron microscopy (EM), a cornerstone tool for exploring mat...

Gradient Boost Dynamic Control for High-Voltage Power Supplies in Ion Implantation

Ion implantation technology, as a core process in semiconducto...