Technical Articles
Dynamic Charge Balance on High-Voltage Power Supply for Electrostatic Chucks
1 Working Principle and Foundation of Dynamic Charge Balance...
Corrosion Protection of Electrodes in Excimer Laser High-Voltage Power Supplies: Material Challenges and Technological Innovations
Excimer laser high-voltage power supplies are core components ...
High-Voltage Power Supply for Lithography Machines: Shielding Against Particle Interference
In semiconductor manufacturing, lithography machines are core e...
Intelligent Dynamic Voltage Balancing for High-Voltage Power Supplies in Ion Implantation
In semiconductor manufacturing, optical coating, and material s...
Design of High-Voltage Power Supply for Electrostatic Chucks: Key Technologies in Multi-Layer Dielectric Withstand Voltage
1 Design Logic and Challenges of Multi-Layer StructuresElectr...
High-Voltage Power Supply for Electron Microscopy: Femtosecond Pulse Modulation Technology
Electron microscopy (EM), a cornerstone tool for exploring mat...
Ultra-High-Frequency Resonant Voltage Stabilization Technology for Lithography Machine High-Voltage Power Supplies
In semiconductor manufacturing, lithography machines are core e...
Gradient Boost Dynamic Control for High-Voltage Power Supplies in Ion Implantation
Ion implantation technology, as a core process in semiconducto...
English Translation: Research on Transient Arc Suppression Algorithms for High-Voltage Power Supplies in Electrostatic Chucks
The electrostatic chuck (ESC), a core component in semiconduct...