Technical Articles

Key Role of Dynamic Response Characteristics of High-Voltage Power Supplies in Etching Processes

Correlation Between Dynamic Response and Etching AccuracyIn sem...

Enhancing High-Voltage Power Supply Efficiency for Excimer Lasers

Excimer lasers, as core deep-ultraviolet (DUV) light sources, ...

Core Applications and Breakthroughs of High-Voltage Power Supply Technology in EUV Lithography Light Sources

Extreme Ultraviolet (EUV) lithography, pivotal for semiconductor...

Reliability Analysis of High-Voltage Modules in Ion Implanters

As core equipment in semiconductor manufacturing, the high-volt...

Design Challenges of High-Voltage Power Supplies for Etching Equipment

In semiconductor manufacturing, plasma etching is a critical p...

Technological Evolution and Application Prospects of High-Voltage Pulse Power Supplies for Excimer Lasers

I Technical BackgroundExcimer lasers (operating at 157-353 nm...

High-Voltage Drive Technology for Lithography Machine Light Sources: The Core Engine of Precision Manufacturing

In semiconductor manufacturing, lithography machines are the co...

Analysis of High-Voltage Power Supply Stability for Ion Implantation

In semiconductor manufacturing, material modification, and biome...

Research on Optimization of High-Voltage Power Supplies for Electrostatic Chucks

The electrostatic chuck (ESC), as a core fixture in semicondu...