Technical Articles
Research on Pre-ionization Control Technology in Excimer Laser High-Voltage Power Supplies
Excimer lasers (e g , ArF, KrF) serve as high-power pulsed ...
Research on Low-Ripple Resonant Topology for High-Voltage Power Supply in Lithography Machines
As the core equipment of semiconductor manufacturing, the expo...
Design and Application of Transient Overvoltage Protection Circuits for High-Voltage Power Supplies in Ion Implantation
Ion implantation is a critical process in semiconductor manufa...
High-Frequency Oscillation Suppression Technology in High-Voltage Power Supplies for Electrostatic Chucks
Electrostatic chucks, a core component in semiconductor manufac...
Breakthrough in Nanometer-Level Ripple Suppression Technology for High-Voltage Power Supplies in Electron Microscopy
The stability of high-voltage power supplies directly impacts ...
Dynamic Power Factor Correction in High-Voltage Power Supplies for Etching Equipment
In semiconductor manufacturing, the stability and energy effici...
Closed-Loop Control of Pulse Energy in Excimer Laser High-Voltage Power Supplies
I Technical Challenges and Core RequirementsExcimer lasers (e...
High-Voltage Power Supply Resonance Energy Recovery Technology in Lithography Machines: Energy Efficiency Revolution in Semiconductor Manufacturing
IntroductionAs the core equipment in semiconductor manufacturing...
Design of an Intelligent Fault Early Warning System for High-Voltage Power Supplies in Ion Implantation
In semiconductor manufacturing, the high-voltage power supply s...