Technical Articles

Research on Pre-ionization Control Technology in Excimer Laser High-Voltage Power Supplies

Excimer lasers (e g , ArF, KrF) serve as high-power pulsed ...

Research on Low-Ripple Resonant Topology for High-Voltage Power Supply in Lithography Machines

As the core equipment of semiconductor manufacturing, the expo...

Dynamic Power Factor Correction in High-Voltage Power Supplies for Etching Equipment

In semiconductor manufacturing, the stability and energy effici...

Closed-Loop Control of Pulse Energy in Excimer Laser High-Voltage Power Supplies

I Technical Challenges and Core RequirementsExcimer lasers (e...