Technical Articles

Quantum Noise Suppression in High-Voltage Power Supplies for Electron Microscopy

The resolution and image quality of electron microscopes (EM)...

Pulse Energy Feedback Control in High-Voltage Power Supplies for Excimer Lasers

Excimer lasers (e g , ArF, KrF, XeCl) are indispensable high...

Multi-Physics Collaborative Simulation for High-Voltage Power Supplies in Lithography Machines

In semiconductor manufacturing, the precision of lithography ma...

Optimization of Energy Utilization in High-Voltage Power Supplies for Ion Implantation

Ion implantation technology, as a core process in semiconducto...

High-Voltage Power Supply Process Gas Adaptation Technology in Etching Equipment

In semiconductor dry etching processes, the chemical properties...

Modeling of Discharge Stability in High-Voltage Power Supplies for Excimer Lasers

Excimer lasers, as critical light sources for semiconductor li...

Adaptive Resonant Frequency Control for High-Voltage Power Supplies in Lithography Systems

In advanced lithography systems, the stability of high-voltage...