Technical Articles

Stability Analysis of High-Voltage Power Supplies for Etching Equipment

Etching processes rely on plasma uniformity and precise ion e...

Optimization of High-Voltage Modules for Excimer Lasers

Excimer lasers are widely used in semiconductor lithography an...

Low-Ripple Power Supply Design for Photolithography Light Sources

Photolithography light sources demand extremely stable power, a...

Precision Control of Ion Implantation Power Supply Systems

Ion implantation is a core step in semiconductor fabrication,...

New Advances in High-Voltage Drive Technology for Electrostatic Chucks

Electrostatic chucks (ESCs) are critical components in semicond...

Precision Focusing and Tissue Protection in Coronary Lithotripsy Pulse Power Supplies

In intravascular lithotripsy for coronary artery treatment, a ...