Technical Articles

Redundant Architecture Design for High-Voltage Power Supplies in Electron Beam Applications

In high-end fields such as high-energy physics research, indus...

Research on High-Frequency Technology of High-Voltage Power Supplies for Exposure Machines

As a core component of exposure machines, the performance of...

Real-Time Monitoring of Dielectric Loss in High-Voltage Power Supplies for Electrostatic Chucks

Key Technologies and ApplicationsIn semiconductor manufacturing,...

Digital Transformation of High-Voltage Power Supplies for Exposure Machines

AbstractAs semiconductor manufacturing advances toward nanoscale...