Technical Articles
Application Practice of Pulse Sequence Chaos Control in Ion Implantation High-Voltage Power Supplies
Ion implantation is a core process for achieving precise impu...
Intelligent Dielectric Loss Compensation Technology for Electrostatic Chuck High-Voltage Power Supplies and Its Applications
In key processes of semiconductor wafer manufacturing such as...
Application Exploration of Avogadro Constant-Level Precision in Electron Microscope High-Voltage Power Supplies
In the fields of nanotechnology and materials science, the re...
Multi-Parameter Coupling Decoupling Control for High-Voltage Power Supply in Etching Equipment
In dry etching equipment, HVPS needs to simultaneously regulat...
Opto-Electrical Synchronization System for Excimer Laser High-Voltage Power Supply
Excimer lasers, characterized by short wavelengths (193nm 248nm...
Single Event Effect Hardening for High-Voltage Power Supply in Lithography Machines
As the core equipment in semiconductor manufacturing, lithograp...
Energy Spatiotemporal Distribution Control of High-Voltage Power Supply for Ion Implantation
1 Process Requirements and Control DifficultiesIon implantatio...
Surface Microplasma Suppression of High-Voltage Power Supply for Electrostatic Chuck (ESC)
1 Application Scenario and Cause of the ProblemThe Electrost...
Power Supply of High-Voltage Power Supply for Electron Microscope to Superconducting Quantum Interference Device (SQUID)
1 Application Background and Technical RequirementsElectron mi...