Technical Articles

Energy Conversion Efficiency Analysis of Vacuum Coating Power Supplies

Vacuum coating processes, such as magnetron sputtering and eva...

High-Frequency Pulse Characteristics of Excimer Laser Power Supplies

Excimer lasers are indispensable in applications requiring high...

Optimization of Polarity Switching in Electrostatic Chuck Power Supplies

Electrostatic chucks (ESCs) are widely used in semiconductor w...

Stability Analysis of High-Voltage Power Supplies for Etching Equipment

Etching processes rely on plasma uniformity and precise ion e...

Optimization of High-Voltage Modules for Excimer Lasers

Excimer lasers are widely used in semiconductor lithography an...

Low-Ripple Power Supply Design for Photolithography Light Sources

Photolithography light sources demand extremely stable power, a...

Precision Control of Ion Implantation Power Supply Systems

Ion implantation is a core step in semiconductor fabrication,...

New Advances in High-Voltage Drive Technology for Electrostatic Chucks

Electrostatic chucks (ESCs) are critical components in semicond...