Technical Articles

Dynamic Load Compensation in High-Voltage Power Supplies for Ion Implantation: A Core Breakthrough in Precision Manufacturing

In semiconductor manufacturing, ion implantation is a critical...

Research on Dielectric Loss Suppression in High-Voltage Power Supplies for Electrostatic Chucks

In semiconductor manufacturing, electrostatic chucks (ESCs) util...

The Rapid Pulse of High Voltage: Analyzing Sub-Millisecond Response Technology in EM High-Voltage Power Supplies

The revealing power of electron microscopy (EM) into the micr...

Multi-Stage Isolation Design for High-Voltage Power Supplies in Lithography Machines

IntroductionAs a core equipment in semiconductor manufacturing,...

Innovation and Applications of Gradient Boosting Technology in Ion Implantation High-Voltage Power Supplies

1 Technical Principle and Core MechanismGradient boosting tec...

Breakdown Protection Mechanisms in High-Voltage Power Supplies for Electrostatic Chucks

Electrostatic chucks, essential for wafer fixation in semicondu...

Strategies for Improving Energy Efficiency Ratio of High-Voltage Power Supplies in Ion Implantation

Ion implantation technology is a core process in semiconductor...

Multi-Physical Field Co-Simulation for High-Voltage Power Supply of Electrostatic Chucks

Abstract:As semiconductor manufacturing advances toward sub-nanom...

Technical Breakthroughs and Applications of Gas Discharge Control in Excimer Laser High-Voltage Power Supplies

Excimer lasers (e g , ArF, KrF) serve as core deep-ultraviol...