Technical Articles

225 kV Oil-Cooled High-Voltage Solution for Rotating-Anode Industrial CT Systems

High-throughput industrial CT of automotive castings and aerosp...

Fast Polarity-Reversal High-Voltage Circuit for Electrostatic Chucks

Next-generation 300 mm plasma tools demand wafer de-chucking a...

450 kV Arc-Current Feedback High-Voltage Power Supply for Electron-Beam Deep-Penetration Welding

Deep-penetration electron-beam welding of 150–300 mm thick...

160 kV Sub-ppm Ripple High-Voltage Power Supply for Lithography E-Chucks

Holding 300 mm wafers with sub-micron flatness during EUV and...

320 kV Marx Generator Upgrade for Particle Accelerator Systems

Legacy air-insulated Marx generators originally commissioned in...

-800 V Pulsed Bias Power Supply for Magnetron Sputtering in Coating Systems

Reactive magnetron sputtering of high-quality optical filters a...

30 kV Miniature High-Voltage Module for Capillary Electrophoresis Lab-on-Chip

Portable and point-of-care capillary electrophoresis chips requi...

450 kV Grid-Controlled High-Voltage Power Supply for Electron-Beam Melting

Electron-beam melting of reactive alloys such as titanium alum...

E-Chuck Dedicated Reverse-Pulse High-Voltage Circuit for De-Chucking

Rapid and particle-free wafer release from bipolar electrostati...