Technical Articles

Multi-Physics Field Collaborative Control of High-Voltage Power Supply for Electrostatic Chuck

In the wafer processing of advanced semiconductor processes (s...

Optimization of RF-DC Coupling for High-Voltage Power Supply in Etching Equipment

In the etching process of semiconductor manufacturing, the hig...

Improvement of Energy Recovery Efficiency for High-Voltage Power Supplies in Ion Implantation

In the doping process of semiconductor manufacturing, ion impl...