Technical Articles
Five-Channel Independently Floating Synchronous High-Voltage Supply for Microchannel Plates
Large-area microchannel-plate detectors for time-of-flight mass ...
320 kV Scanning Deflection High-Voltage Waveform Correction for Ion Implantation
High-dose ion implantation on 300 mm wafers at 320 keV requi...
Main-Discharge High-Voltage Magnetic Switch Compression for Excimer Lasers
The 308 nm XeCl and 193 nm ArF excimer lasers for lithograp...
225 kV Oil-Cooled High-Voltage Solution for Rotating-Anode Industrial CT Systems
High-throughput industrial CT of automotive castings and aerosp...
Fast Polarity-Reversal High-Voltage Circuit for Electrostatic Chucks
Next-generation 300 mm plasma tools demand wafer de-chucking a...
450 kV Arc-Current Feedback High-Voltage Power Supply for Electron-Beam Deep-Penetration Welding
Deep-penetration electron-beam welding of 150–300 mm thick...
160 kV Sub-ppm Ripple High-Voltage Power Supply for Lithography E-Chucks
Holding 300 mm wafers with sub-micron flatness during EUV and...
320 kV Marx Generator Upgrade for Particle Accelerator Systems
Legacy air-insulated Marx generators originally commissioned in...
-800 V Pulsed Bias Power Supply for Magnetron Sputtering in Coating Systems
Reactive magnetron sputtering of high-quality optical filters a...