Technical Articles

Fast-Discharge High-Voltage Module Design for Electrostatic Chucks

Electrostatic chucks in 300 mm plasma etch and deposition too...

160 kV Ultra-Low Ripple High-Voltage Power Supply for Electron-Beam Lithography Systems

Writing features below 3 nm with electron-beam lithography req...

Dual-Tandem 160 kV High-Voltage Power Supply Upgrades for Ion Implantation Systems

Medium-current and high-energy ion implanters increasingly adopt...

Synchronized Flash High-Voltage Triggering for Ampoule Inspection Machines

High-speed ampoule inspection lines operate at 600-900 units p...

Reversible-Polarity High-Voltage Power Supplies for Capillary Zone Electrophoresis (CZE)

Capillary zone electrophoresis separates charged biomolecules wi...

Arc-Suppression High-Voltage Power Supplies for Vacuum Coating Applications

Reactive arc coating processes using titanium, aluminum, and c...

450 kV Ultra-Stable High-Voltage Technology for Electron-Beam Lithography Systems

Electron-beam lithography at sub-3 nm nodes demands acceleratio...

Multi-Channel Parallel High-Voltage Power Supplies for Electrostatic Ore Separation

Electrostatic separation of minerals relies on differential cha...

Redundancy Design for 225kV Industrial CT System High Voltage Power Supply

Industrial Computed Tomography (CT) systems operating at high ...