Technical Articles

225 kV Floating High-Voltage Solution for Vacuum Coating Electron Guns

Large-area precision optical coating and high-rate metallization...

Quad-Independent High-Voltage Power Supplies for Microchannel Plates

Night-vision intensifiers, fast timing detectors, and space-born...

Bipolar Bias High-Voltage Power Supply for 320 kV Ion Implantation Systems

High-energy ion implanters operating at terminal voltages up t...

Pre-Ionization High-Voltage Optimization for Excimer ArF Lasers

The 193 nm ArF excimer laser remains the workhorse of immers...

450 kV Pulsed Modulated Power Supply for Industrial Irradiation Accelerators

Industrial electron-beam irradiation for sterilization, polymer ...

Fast-Discharge High-Voltage Module Design for Electrostatic Chucks

Electrostatic chucks in 300 mm plasma etch and deposition too...

160 kV Ultra-Low Ripple High-Voltage Power Supply for Electron-Beam Lithography Systems

Writing features below 3 nm with electron-beam lithography req...

Dual-Tandem 160 kV High-Voltage Power Supply Upgrades for Ion Implantation Systems

Medium-current and high-energy ion implanters increasingly adopt...

Synchronized Flash High-Voltage Triggering for Ampoule Inspection Machines

High-speed ampoule inspection lines operate at 600-900 units p...