Technical Articles
Fast-Discharge High-Voltage Module Design for Electrostatic Chucks
Electrostatic chucks in 300 mm plasma etch and deposition too...
160 kV Ultra-Low Ripple High-Voltage Power Supply for Electron-Beam Lithography Systems
Writing features below 3 nm with electron-beam lithography req...
Dual-Tandem 160 kV High-Voltage Power Supply Upgrades for Ion Implantation Systems
Medium-current and high-energy ion implanters increasingly adopt...
Synchronized Flash High-Voltage Triggering for Ampoule Inspection Machines
High-speed ampoule inspection lines operate at 600-900 units p...
Reversible-Polarity High-Voltage Power Supplies for Capillary Zone Electrophoresis (CZE)
Capillary zone electrophoresis separates charged biomolecules wi...
Arc-Suppression High-Voltage Power Supplies for Vacuum Coating Applications
Reactive arc coating processes using titanium, aluminum, and c...
450 kV Ultra-Stable High-Voltage Technology for Electron-Beam Lithography Systems
Electron-beam lithography at sub-3 nm nodes demands acceleratio...
Multi-Channel Parallel High-Voltage Power Supplies for Electrostatic Ore Separation
Electrostatic separation of minerals relies on differential cha...
Redundancy Design for 225kV Industrial CT System High Voltage Power Supply
Industrial Computed Tomography (CT) systems operating at high ...